Materials Science Facilities

Nanoscale imaging facilities:

Nanofabrication equipment:

  • Hitachi S-3500 equipped with NPGS lithography system (Electron Beamn Writer)
  • Van-der-Waals materials micro-positioning station
  • Thin-film deposition hybrid system (Base pressure of 2E-8 Torr, with 2 thermal evaporation crucibles and 2 sputtering guns, capable of both RF and DC-magnetron sputtering)

Surface science equipment:

  • CVD furnace 
  • Fume hoods equipped with a spin-coater
  • Plasma processing oven (with tunable gas flowmeters, and tunable power) 

Materials Characterization:

  • 4K cryogenic system equipped with electrical transport capabilities
  • Electronic transport data acquisition equipment (Lock-in amplifiers, SMUs, Analog input and output DACs, Multimeters...)