Feature | Description |
|---|---|
| PERFORMANCE | 1.5 nm resolution 20 to 300,000x magnification |
| ELECTRON GUN | Cold-cathode field emission electron gun |
| EMISSION EXTRACTING VOLTAGE | 0 to 6.5 kV |
| ACCELERATING VOLTAGE | 0.5 to 10 kV in 100 V steps 10 to 30 kV in 1 kV steps |
| LENS SYSTEM | 2-stage electromagnetic lens |
| OBJECTIVE APERATURE | Movable aperture (4 openings selectable/alignable outside column) |
| STIGMATOR COIL | Electromagnetic type |
| SCANNING COIL | 2-stage electromagnetic type |
| MOTION RANGE | X: 0 to 25 mm continuous Y: 0 to 25 mm continuous Z (WD): 5 to 30 mm continuous Tilt: -5º to 45º Rotation: 360º continuous |
| MAXIMUM SPECIMEN SIZE | 76 mm in diameter (airlock specimen exchange) 102 mm in diameter (draw-out specimen exchange) |