JEOL 6000F HRSEM

JEOL 6000F HRSEM

Feature

Description

PERFORMANCE0.6 nm secondary electron image resolution at 30 kV; 3.0 nm resolution at 1 kV
1.5 nm backscattered electron image resolution at 30 kV
10 to 450x magnification at LM mode; 500 to 950,000x at HR mode
ELECTRON GUNCold-cathode field emission
ACCELERATING VOLTAGE0.5 to 5 kV in 100 V steps
5 to 30 kV in 1 kV steps
EMITTER<310> tungsten tip
ALIGNMENTMechanical and electromagnetic deflection
LENS SYSTEM2-stage electromagnetic zooming system (condenser lens)
Strongly excited low-aberration lens (objective lens)
SPECIMEN STAGE TYPEFully eucentric goniometer stage
MOTION RANGEX: 0 to 2.4 mm
Y: 0 to 8 mm
Z: 0 to 0.6 mm
Tilt: ±30º (±8º at backscattered electron image observation)
SPECIMEN RETAINER SIZE23 mm x 6 mm x 1/1.5 mm
SPECIMEN EXCHANGEUse of airlock