Hitachi S5000 HRSEM

Hitachi S5000 HRSEM

Feature

Description

PERFORMANCE0.6 nm resolution at 30 kV in secondary electron image; 3.5 nm at 1 kV
30 to 500x magnification (low mag mode); 250 to 800,000x (high mag mode)
ELECTRON GUNCold field emission source
ACCELERATING VOLTAGE0.5 to 30 kV in 100 V steps
LENS SYSTEM3-stage electromagnetic lens
OBJECTIVE APERATURE4 openings, selectable and alignable from outside the vacuum, anticontamination heater build-in
STIGMATOROctappole electromagnetic type (X,Y)
SCANNING COIL2-stage electromagnetic
SPECIMEN STAGE SYSTEMSide entry type
MOTIONX: ±3.5 mm continuous
Y: ±2 mm continuous
Tilt: ±40º continuous; restricted by optional specimen holders and optional detectors
SPECIMEN SIZE9.5 mm x 5 mm x 2.4 mm (h) for standard holder
20 mm x 6 mm x 2.4 mm (h) for large specimen holder
SPECIMEN EXCHANGEAirlock type with prepumping