Feature | Description |
|---|---|
| PERFORMANCE | 6 nm resolution 700 to 90,000x magnification (for checking image resolution; magnification settable up to 300,000x) |
| ION SOURCE | Ga ions 1,000 h lifetime manual emitter positional adjustment |
| ACCELERATING VOLTAGE | Up to 40 kV |
| MAX. FIB CURRENT DENSITY | 25 A/cm or higher |
| LENS SYSTEM | 2-stage electromagnetic lens |
| ASTIGMATISM CORRECTION | Octopole electrostatic system |
| X. Y DETECTION | Octopole electrostatic system |
| BLANKING | Electrostatic system |
| APERATURE | Motor-operated CPU controlled system, 7 settings |
| PROCESSING SPEED | 1.0 μm/s or higher (at beam diameter of 0.2 μm) |
| SECONDARY ELECTRON DETECTOR | Scintilator type detector w/ photomultiplier amplifier |