Feature | Description |
|---|---|
| PERFORMANCE | 0.6 nm resolution at 30 kV in secondary electron image; 3.5 nm at 1 kV 30 to 500x magnification (low mag mode); 250 to 800,000x (high mag mode) |
| ELECTRON GUN | Cold field emission source |
| ACCELERATING VOLTAGE | 0.5 to 30 kV in 100 V steps |
| LENS SYSTEM | 3-stage electromagnetic lens |
| OBJECTIVE APERATURE | 4 openings, selectable and alignable from outside the vacuum, anticontamination heater build-in |
| STIGMATOR | Octappole electromagnetic type (X,Y) |
| SCANNING COIL | 2-stage electromagnetic |
| SPECIMEN STAGE SYSTEM | Side entry type |
| MOTION | X: ±3.5 mm continuous Y: ±2 mm continuous Tilt: ±40º continuous; restricted by optional specimen holders and optional detectors |
| SPECIMEN SIZE | 9.5 mm x 5 mm x 2.4 mm (h) for standard holder 20 mm x 6 mm x 2.4 mm (h) for large specimen holder |
| SPECIMEN EXCHANGE | Airlock type with prepumping |