Feature | Description |
|---|---|
| PERFORMANCE | 0.6 nm secondary electron image resolution at 30 kV; 3.0 nm resolution at 1 kV 1.5 nm backscattered electron image resolution at 30 kV 10 to 450x magnification at LM mode; 500 to 950,000x at HR mode |
| ELECTRON GUN | Cold-cathode field emission |
| ACCELERATING VOLTAGE | 0.5 to 5 kV in 100 V steps 5 to 30 kV in 1 kV steps |
| EMITTER | <310> tungsten tip |
| ALIGNMENT | Mechanical and electromagnetic deflection |
| LENS SYSTEM | 2-stage electromagnetic zooming system (condenser lens) Strongly excited low-aberration lens (objective lens) |
| SPECIMEN STAGE TYPE | Fully eucentric goniometer stage |
| MOTION RANGE | X: 0 to 2.4 mm Y: 0 to 8 mm Z: 0 to 0.6 mm Tilt: ±30º (±8º at backscattered electron image observation) |
| SPECIMEN RETAINER SIZE | 23 mm x 6 mm x 1/1.5 mm |
| SPECIMEN EXCHANGE | Use of airlock |